- 专利标题： METHOD AND APPARATUS FOR TRANSFER OF FILMS AMONG SUBSTRATES
-
申请号： EP13860728.8申请日： 2013-12-06
-
公开(公告)号： EP2928700B1公开(公告)日： 2018-09-12
- 发明人: WILLNER, Bruce, Ira
- 申请人： AIXTRON SE
- 申请人地址： Dornkaulstrasse 2 52134 Herzogenrath DE
- 专利权人： AIXTRON SE
- 当前专利权人： AIXTRON SE
- 当前专利权人地址： Dornkaulstrasse 2 52134 Herzogenrath DE
- 代理机构： Ricker, Mathias
- 优先权： US201261797471P 20121207
- 国际公布： WO2014089437 20140612
- 主分类号： B44C3/08
- IPC分类号： B44C3/08 ; B28B19/00
摘要：
A method is disclosed which includes: forming at least one layer of material on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; attaching a second substrate to a second surface of the at least one layer of material; forming bubbles at the interface; and applying mechanical force; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate. Related arrangements are also described.
公开/授权文献
- EP2928700A1 METHOD AND APPARATUS FOR TRANSFER OF FILMS AMONG SUBSTRATES 公开/授权日：2015-10-14
信息查询
