发明公开
EP2933359A1 METHOD FOR GROWING A BETA-GA2O3 SINGLE CRYSTAL
审中-公开
VERFAHREN ZURZÜCHTUNGEINES BETA-GA203-EINKRISTALLS
- 专利标题: METHOD FOR GROWING A BETA-GA2O3 SINGLE CRYSTAL
- 专利标题(中): VERFAHREN ZURZÜCHTUNGEINES BETA-GA203-EINKRISTALLS
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申请号: EP13853138.9申请日: 2013-10-09
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公开(公告)号: EP2933359A1公开(公告)日: 2015-10-21
- 发明人: WATANABE, Shinya , WAKIMOTO, Daiki , IIZUKA, Kazuyuki , KOSHI, Kimiyoshi , MASUI, Takekazu
- 申请人: Tamura Corporation , Koha Co., Ltd.
- 申请人地址: 1-19-43 Higashi-Oizumi Nerima-ku Tokyo 178-8511 JP
- 专利权人: Tamura Corporation,Koha Co., Ltd.
- 当前专利权人: Tamura Corporation,Koha Co., Ltd.
- 当前专利权人地址: 1-19-43 Higashi-Oizumi Nerima-ku Tokyo 178-8511 JP
- 代理机构: Betten & Resch
- 优先权: JP2012245357 20121107
- 国际公布: WO2014073314 20140515
- 主分类号: C30B29/16
- IPC分类号: C30B29/16 ; C30B15/34 ; C30B15/36
摘要:
Provided is a method for growing a β-Ga 2 O 3 single crystal, which enables the production of a plate-like β-Ga 2 O 3 single crystal having high crystal quality. In one embodiment, a method for growing a β-Ga 2 O 3 single crystal employing an EFG method is provided, said method comprising the steps of: bringing a plate-like seed crystal (20) into contact with a Ga203 melt (12), wherein the plate-like seed crystal (20) comprises a β-Ga 2 O 3 single crystal having a defect density of 5x10 5 /cm 2 or less in the whole region; and pulling up the seed crystal (20) to grow a β-Ga 2 O 3 single crystal (25).
公开/授权文献
- EP2933359B1 METHOD FOR GROWING A BETA-GA2O3-BASED SINGLE CRYSTAL 公开/授权日:2020-03-11
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