发明公开
- 专利标题: AIRFLOW SENSOR
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申请号: EP13862045.5申请日: 2013-11-21
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公开(公告)号: EP2933642A9公开(公告)日: 2018-10-17
- 发明人: NAGATOMO, Noriaki , INABA, Hitoshi
- 申请人: Mitsubishi Materials Corporation
- 申请人地址: 3-2, Otemachi 1-chome Chiyoda-ku Tokyo 100-8117 JP
- 专利权人: Mitsubishi Materials Corporation
- 当前专利权人: Mitsubishi Materials Corporation
- 当前专利权人地址: 3-2, Otemachi 1-chome Chiyoda-ku Tokyo 100-8117 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2012271938 20121213
- 国际公布: WO2014091932 20140619
- 主分类号: G01F1/692
- IPC分类号: G01F1/692 ; G01F1/684 ; G01P5/12 ; H01C7/04 ; H01C1/014 ; H01C17/065
摘要:
Provided is a gas flow sensor that includes a heat-sensitive element for measurement disposed inside a duct through which a gas to be measured flows and a support mechanism for supporting the heat-sensitive element for measurement inside the duct. The heat-sensitive element for measurement includes an insulating film; a thin film thermistor portion formed on the surface of the insulating film with a thermistor material; a pair of comb electrodes which have a plurality of comb portions and are pattern-formed on the thin film thermistor portion using a metal so as to face each other; and a pair of pattern electrodes which are pattern-formed on the surface of the insulating film and are connected to the pair of comb electrodes. The support mechanism is disposed such that the planar direction of the insulating film is parallel to the direction of gas flow in the duct.
公开/授权文献
- EP2933642A1 AIRFLOW SENSOR 公开/授权日:2015-10-21
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