发明公开
- 专利标题： ULTRASONIC TRANSDUCER ELECTRODE ASSEMBLY
- 专利标题（中）： 超声波换能器的电极装置
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申请号： EP13867475申请日： 2013-12-23
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公开(公告)号： EP2938264A4公开(公告)日： 2016-09-07
- 发明人: RICE CHERYL , XI DONGJUAN CHRIS
- 申请人： VOLCANO CORP
- 专利权人： VOLCANO CORP
- 当前专利权人： VOLCANO CORP
- 优先权： US201261747498 2012-12-31
- 主分类号： A61B8/12
- IPC分类号： A61B8/12 ; B06B1/06 ; H01L41/047 ; H01L41/29 ; H04R17/00
摘要：
The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
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