- 专利标题: DISPLACEMENT DETECTING DEVICE
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申请号: EP15174963.7申请日: 2015-07-02
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公开(公告)号: EP2963392B1公开(公告)日: 2017-11-22
- 发明人: NAKAMURA, Yusuke , MIDERA, Yoshiyuki , TAMIYA, Hideaki
- 申请人: DMG Mori Seiki Co. Ltd.
- 申请人地址: 106 Kitakoriyama-cho Yamatokoriyama-shi Nara 639-1160 JP
- 专利权人: DMG Mori Seiki Co. Ltd.
- 当前专利权人: DMG Mori Seiki Co. Ltd.
- 当前专利权人地址: 106 Kitakoriyama-cho Yamatokoriyama-shi Nara 639-1160 JP
- 代理机构: Betten & Resch
- 优先权: JP2014136970 20140702
- 主分类号: G01D5/26
- IPC分类号: G01D5/26 ; G01B9/02
摘要:
To provide a displacement detection apparatus capable of detecting a displacement in the height direction of a member to be measured, with a high precision, and also capable of performing a high-speed and stable measurement. A first light flux L1 serving as object light is caused to enter a member to be measured 5, and reflected light thereof is caused to enter again the member to be measured 5 after being diffracted by a first diffraction grating 7. Then, the second-time reflected light of the first light flux L1 by the member to be measured 5 is diffracted by a second diffraction grating 9. By diffracting the first light flux L1 by the second diffraction grating 9, a change of the optical path length caused by tilting of the member to be measured 5 is cancelled.
公开/授权文献
- EP2963392A1 DISPLACEMENT DETECTING DEVICE 公开/授权日:2016-01-06
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