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发明公开
EP2977154A1 Feeding device and object driving device 审中-公开
Zufuhrvorrichtung und Gegenstandsansteuerungsvorrichtung

Feeding device and object driving device
摘要：
To provide a feeding device (40) which is capable of driving an object (W) with high accuracy while holding the object (W) and controlling its attitude and capable of improving durability by effectively separating a holding device (17) and a driving device (41, 49) from each other, and an object driving device. The feeding device (17) movably disposed through a cover device (14) so as to face a work region (E) shielded by the cover device (14), for holding an object (W), includes: a first rotary saddle (59) that is rotatable about a first axis; a second rotary saddle (47) that is disposed on the first rotary saddle (59) and rotatable about a second axis perpendicular to the first axis; a holding device (17) that holds the object (W); a first driving device (49) that is disposed outward of the cover device (14) with respect to the work region (E) to rotate the first rotary saddle (59); and a second driving device (41) that is disposed outward of the cover device (14) with respect to the work region (E) to rotate the second rotary saddle (47).
摘要（中）：

为了提供一种能够在保持物体（W）的同时高精度地驱动物体（W）并控制其姿态并且能够通过有效地分离保持装置（17）和驱动装置来提高耐久性的供给装置（40） （41,49），以及物体驱动装置。 通过覆盖装置（14）可移动地设置以面对由盖装置（14）屏蔽的用于保持物体（W）的工作区域（E）的进给装置（17）包括：第一旋转鞍座（59） ），其可围绕第一轴线旋转; 第二旋转鞍座（47），其设置在所述第一旋转鞍座（59）上并且能够围绕垂直于所述第一轴线的第二轴线旋转; 保持物体（W）的保持装置（17） 第一驱动装置（49），其相对于所述工作区域（E）设置在所述盖装置（14）的外侧，以使所述第一旋转鞍座（59）旋转; 以及第二驱动装置（41），其相对于所述工作区域（E）设置在所述盖装置（14）的外侧，以旋转所述第二旋转鞍座（47）。

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