发明公开
- 专利标题： VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG EINER STRUKTUR AUS AUSHÄRTBAREM MATERIAL DURCH ABFORMUNG
- 专利标题（英）： Device and method for producing a structure from curable material by impression
- 专利标题（中）： 装置及其制造方法固化材料的结构依曝光
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申请号： EP14716794.4申请日： 2014-04-08
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公开(公告)号： EP2988914A1公开(公告)日： 2016-03-02
- 发明人: WIPPERMANN, Frank , REIMANN, Andreas , DUNKEL, Jens , BRÄUER, Andreas
- 申请人： Fraunhofer Gesellschaft zur Förderung der angewandten Forschung E.V.
- 申请人地址： Hansastrasse 27C 80686 München DE
- 专利权人： Fraunhofer Gesellschaft zur Förderung der angewandten Forschung E.V.
- 当前专利权人： Fraunhofer Gesellschaft zur Förderung der angewandten Forschung E.V.
- 当前专利权人地址： Hansastrasse 27C 80686 München DE
- 代理机构： Schenk, Markus
- 优先权： DE102013207243 20130422
- 国际公布： WO2014173676 20141030
- 主分类号： B29C35/08
- IPC分类号： B29C35/08 ; B29C35/02 ; B29C37/00 ; B29D11/00
摘要：
The invention relates to a device for the varying radiation by means of beam shaping. The invention further relates to a method for producing a structure of curable material by impression. In a first step of the method, an impression tool is arranged above a surface, such that in a region between the impression tool and the surface the curable material is adjacent to the surface and to an impression surface of the impression tool facing the surface of said curable material, and such that further curable material can continue to flow into the region. In a second step, the curable material is radiated in the region in a locally varying manner in such a way that the beam undergoes a beam shaping in an optical channel, and such that the curable material cures at a different speed in a laterally varying manner.
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