发明公开
EP2995368A1 Method for manufacturing nanoholes and filter manufactured by the same 审中-公开
Verfahren zur Herstellung vonNanolöchernund Filter damit

Method for manufacturing nanoholes and filter manufactured by the same
摘要:
A method for manufacturing nanoholes and a filter manufactured by the same are provided, the method being capable of easily manufacturing nanoholes with a size of several to hundreds of nanometers, the method including: a preparing step of preparing a body having a through-hole which passes through two facing surfaces and has a nano- or micro-scale diameter; and a particle injecting step of injecting particles with a smaller diameter than the through-hole into the through-hole to form nanoholes with a smaller scale than the through-hole.
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