发明授权
- 专利标题： SUB-ATMOSPHERIC STORAGE AND DELIVERY PACKAGE CONTAINING ALUMINIUM DOPANT COMPOSITIONS
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申请号： EP14732764.7申请日： 2014-05-28
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公开(公告)号： EP3005396B1公开(公告)日： 2018-07-04
- 发明人: SINHA, Ashwini, K. , BROWN, Lloyd, A.
- 申请人： Praxair Technology Inc.
- 申请人地址： 39 Old Ridgebury Road Danbury, CT 06810 US
- 专利权人： Praxair Technology Inc.
- 当前专利权人： Praxair Technology Inc.
- 当前专利权人地址： 39 Old Ridgebury Road Danbury, CT 06810 US
- 代理机构： BRP Renaud & Partner mbB Rechtsanwälte Patentanwälte Steuerberater
- 优先权： US201361827934P 20130528; US201414287840 20140527
- 国际公布： WO2014193867 20141204
- 主分类号： H01J37/08
- IPC分类号： H01J37/08 ; H01J37/317
摘要：
A novel method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected with sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process.
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