发明公开
- 专利标题: CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR
- 专利标题(中): 电容式微机械加速度传感器
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申请号: EP14752390.6申请日: 2014-06-27
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公开(公告)号: EP3014284A1公开(公告)日: 2016-05-04
- 发明人: LIUKKU, Matti , RYTKÖNEN, Ville-Pekka , BLOMQVIST, Anssi
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: 10-1, Higashikotari 1-chome Nagaokakyo-shi, Kyoto 617-8555 JP
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: 10-1, Higashikotari 1-chome Nagaokakyo-shi, Kyoto 617-8555 JP
- 代理机构: Boco IP Oy Ab
- 优先权: FI20135714 20130628
- 国际公布: WO2014207709 20141231
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P15/18 ; G01P15/08
摘要:
The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor (2), a second sensor (4), and a third sensor (5). The first sensor (2) comprises a rotor electrode (6) and stator electrode (7). The sensor comprises a first beam (8) that is connected to a rotor electrode support structure (19) and that is connected to the rotor electrode (6). The sensor comprises a second beam (12) that is connected to the rotor electrode support structure (19) and that is connected to the rotor electrode (6). The second sensor (4) is situated in a first space (17) circumscribed by the first beam (8), the first sensor (2), and the rotor electrode support structure (19).The third sensor (5) is situated in a second space (18) circumscribed by the second beam (12), the first sensor (2), and the rotor electrode support structure (19).
公开/授权文献
- EP3014284B1 CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR 公开/授权日:2017-04-12
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