发明公开
EP3014284A1 CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR 有权
电容式微机械加速度传感器

CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR
摘要:
The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor (2), a second sensor (4), and a third sensor (5). The first sensor (2) comprises a rotor electrode (6) and stator electrode (7). The sensor comprises a first beam (8) that is connected to a rotor electrode support structure (19) and that is connected to the rotor electrode (6). The sensor comprises a second beam (12) that is connected to the rotor electrode support structure (19) and that is connected to the rotor electrode (6). The second sensor (4) is situated in a first space (17) circumscribed by the first beam (8), the first sensor (2), and the rotor electrode support structure (19).The third sensor (5) is situated in a second space (18) circumscribed by the second beam (12), the first sensor (2), and the rotor electrode support structure (19).
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