发明公开
EP3023838A4 ILLUMINATION DEVICE FOR PROJECTION MASK ALIGNER AND APPLICATION METHOD
有权
BELEUCHTUNGSVORRICHTUNGFÜRPROJEKTIONSMASKENAUSRICHTER UND ANWENDUNGSVERFAHREN
- 专利标题: ILLUMINATION DEVICE FOR PROJECTION MASK ALIGNER AND APPLICATION METHOD
- 专利标题(中): BELEUCHTUNGSVORRICHTUNGFÜRPROJEKTIONSMASKENAUSRICHTER UND ANWENDUNGSVERFAHREN
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申请号: EP13889451申请日: 2013-08-26
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公开(公告)号: EP3023838A4公开(公告)日: 2017-06-21
- 发明人: ZENG AIJUN , ZHANG YUNBO , CHEN MINGXING , WANG YING , HUANG HUIJIE
- 申请人: SHANGHAI INST OPTICS & FINE MECH CAS
- 专利权人: SHANGHAI INST OPTICS & FINE MECH CAS
- 当前专利权人: SHANGHAI INST OPTICS & FINE MECH CAS
- 优先权: CN201310307405 2013-07-19
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G02B27/09
摘要:
An illumination device comprising a laser source, a beam expander, a micromirror array having a first control system, a fast steering mirror having a second control system, a diaphragm array, a microlens array, an illumination lens group, and a reflection mirror sequentially along the propagation direction of the laser beam. The first control system comprises a first computer controlling each micromirror on the micro-mirror array through the micromirror array controller to rotate in two-dimensional directions so expanded beam forms desired intensity patterns on the diaphragm array after reflected by the micromirror array and fast reflection mirror and a micromirror array controller; the second control system comprises a second computer controlling the reflection mirror of the fast steering mirror to rotate through fast steering mirror controller so created intensity pattern moves relative to the diaphragm array and a fast steering mirror controller. Method for using the illumination device is provided.
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