发明公开
- 专利标题: VERFAHREN ZUM MESSEN DER EINDRINGTIEFE EINES LASERSTRAHLS IN EIN WERKSTÜCK SOWIE LASERBEARBEITUNGSVORRICHTUNG
- 专利标题(英): Method for measuring the depth of penetration of a laser beam into a workpiece, and laser machining device
- 专利标题(中): 方法用于测量激光束穿透深度工件与激光处理装置
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申请号: EP14766909.7申请日: 2014-09-13
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公开(公告)号: EP3049755A1公开(公告)日: 2016-08-03
- 发明人: SCHÖNLEBER, Martin , KOGEL-HOLLACHER, Markus , BAUTZE, Thibault , FRAAS, Christian
- 申请人: Precitec Optronik GmbH
- 申请人地址: Schleussnerstraße 54 63263 Neu-Isenburg DE
- 专利权人: Precitec Optronik GmbH
- 当前专利权人: Precitec Optronik GmbH
- 当前专利权人地址: Schleussnerstraße 54 63263 Neu-Isenburg DE
- 代理机构: Ostertag & Partner Patentanwälte
- 优先权: DE102013015656 20130923
- 国际公布: WO2015039741 20150326
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; B23K26/02
摘要:
The invention relates to a method for measuring the depth of penetration of a laser beam (19) into a workpiece (24, 26), wherein the laser beam is focused in a focal spot (22) by means of a focusing optical unit (14) arranged in a machining head. The focal spot produces a vapor capillary (88) in the workpiece. An optical coherence tomograph (40) produces a first measurement beam (70a) and a second measurement beam (70b). The first measurement beam (70a) is directed at a first measurement point (MPa) at the base of the vapor capillary (88) in order to thereby measure a first distance (a1) between a reference point and the first measurement point (MPa). At the same time, the second measurement beam (70b) is directed at a second measurement point (MPb) on a surface (92) of the workpiece (24) which faces the machining head (14) and which is outside of the vapor capillary (88) in order to thereby measure a second distance (a2) between the reference point and the second measurement point (MPb). The depth of penetration (d) of the laser beam then results as the difference between the second distance (a2) and the first distance (a1).
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