发明公开
EP3059336A1 NITRIDE SEMICONDUCTOR CRYSTAL, MANUFACTURING METHOD, AND MANUFACTURING APPARATUS 审中-公开
NITRIDHALBLEITERKRISTALL,HERSTELLUNGSVERFAHREN UND HERSTELLUNGSVORRICHTUNG

NITRIDE SEMICONDUCTOR CRYSTAL, MANUFACTURING METHOD, AND MANUFACTURING APPARATUS
摘要:
A nitride semiconductor crystal has a diameter of four inches or more and is warped to have a curvature radius of 100 m or more, and has an impurity concentration of 1 × 10 17 /cm 3 or lower. A manufacturing method for a nitride semiconductor crystal includes providing a substrate, feeding a gallium trihalide gas having a partial pressure of 9.0 × 10 -3 atm or higher onto the substrate, and growing a GaN crystal in the -C-axis direction on the substrate, where a growth temperature for the GaN crystal is 1200°C or higher, or a manufacturing method for a nitride semiconductor crystal includes providing a substrate, feeding an aluminum trihalide gas having a partial pressure of 9.0 × 10 -3 atm or higher onto the substrate, and growing an AlN crystal in the -C-axis direction on the substrate, where a growth temperature for the AlN crystal is 1400°C or higher.
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