发明公开
EP3059336A1 NITRIDE SEMICONDUCTOR CRYSTAL, MANUFACTURING METHOD, AND MANUFACTURING APPARATUS
审中-公开
NITRIDHALBLEITERKRISTALL,HERSTELLUNGSVERFAHREN UND HERSTELLUNGSVORRICHTUNG
- 专利标题: NITRIDE SEMICONDUCTOR CRYSTAL, MANUFACTURING METHOD, AND MANUFACTURING APPARATUS
- 专利标题(中): NITRIDHALBLEITERKRISTALL,HERSTELLUNGSVERFAHREN UND HERSTELLUNGSVORRICHTUNG
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申请号: EP14843243.8申请日: 2014-09-10
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公开(公告)号: EP3059336A1公开(公告)日: 2016-08-24
- 发明人: KOUKITU, Akinori , KUMAGAI, Yoshinao , MURAKAMI, Hisashi
- 申请人: National University Corporation Tokyo University Of Agriculture and Technology
- 申请人地址: 3-8-1 Harumi-cho Fuchu-shi Tokyo 183-8538 JP
- 专利权人: National University Corporation Tokyo University Of Agriculture and Technology
- 当前专利权人: National University Corporation Tokyo University Of Agriculture and Technology
- 当前专利权人地址: 3-8-1 Harumi-cho Fuchu-shi Tokyo 183-8538 JP
- 代理机构: Michalski Hüttermann & Partner Patentanwälte mbB
- 优先权: JP2013188805 20130911
- 国际公布: WO2015037232 20150319
- 主分类号: C30B29/38
- IPC分类号: C30B29/38
摘要:
A nitride semiconductor crystal has a diameter of four inches or more and is warped to have a curvature radius of 100 m or more, and has an impurity concentration of 1 × 10 17 /cm 3 or lower. A manufacturing method for a nitride semiconductor crystal includes providing a substrate, feeding a gallium trihalide gas having a partial pressure of 9.0 × 10 -3 atm or higher onto the substrate, and growing a GaN crystal in the -C-axis direction on the substrate, where a growth temperature for the GaN crystal is 1200°C or higher, or a manufacturing method for a nitride semiconductor crystal includes providing a substrate, feeding an aluminum trihalide gas having a partial pressure of 9.0 × 10 -3 atm or higher onto the substrate, and growing an AlN crystal in the -C-axis direction on the substrate, where a growth temperature for the AlN crystal is 1400°C or higher.
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