发明公开
EP3084306A1 METHOD AND APPARATUS FOR MONITORING PORT BLOCKAGE FOR TDLAS MEASUREMENTS IN HARSH ENVIRONMENTS
审中-公开
方法和仪器监测端口阻止在恶劣的环境TDLAS测
- 专利标题： METHOD AND APPARATUS FOR MONITORING PORT BLOCKAGE FOR TDLAS MEASUREMENTS IN HARSH ENVIRONMENTS
- 专利标题（中）： 方法和仪器监测端口阻止在恶劣的环境TDLAS测
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申请号： EP14872360.4申请日： 2014-12-22
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公开(公告)号： EP3084306A1公开(公告)日： 2016-10-26
- 发明人: MASTERSON, Bernard P. , ESTES, Michael John , SAPPEY, AndrewD.
- 申请人： Zolo Technologies, Inc.
- 申请人地址： 331 S. 104th Street Louisville, CO 80027 US
- 专利权人： Zolo Technologies, Inc.
- 当前专利权人： Zolo Technologies, Inc.
- 当前专利权人地址： 331 S. 104th Street Louisville, CO 80027 US
- 代理机构： V.O.
- 优先权： US201361919228P 20131220
- 国际公布： WO2015095861 20150625
- 主分类号： F23N5/08
- IPC分类号： F23N5/08
摘要：
A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.
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