发明公开
EP3086360A1 SEMICONDUCTOR ELEMENT, METHOD FOR PRODUCING SAME AND ALIPHATIC POLYCARBONATE
有权
HALBLEITERBAUEMENT,VERFAHREN ZUR HERSTELLUNG DAVON UND ALIPHATISCHES POLYCARBONAT
- 专利标题: SEMICONDUCTOR ELEMENT, METHOD FOR PRODUCING SAME AND ALIPHATIC POLYCARBONATE
- 专利标题(中): HALBLEITERBAUEMENT,VERFAHREN ZUR HERSTELLUNG DAVON UND ALIPHATISCHES POLYCARBONAT
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申请号: EP14871269.8申请日: 2014-12-16
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公开(公告)号: EP3086360A1公开(公告)日: 2016-10-26
- 发明人: INOUE, Satoshi , SHIMODA, Tatsuya , FUJIMOTO, Nobutaka , NISHIOKA, Kiyoshi , KARASHIMA, Shuichi
- 申请人: Japan Advanced Institute of Science and Technology , Sumitomo Seika Chemicals Co., Ltd.
- 申请人地址: 1-1, Asahidai Nomi-shi Ishikawa 923-1292 JP
- 专利权人: Japan Advanced Institute of Science and Technology,Sumitomo Seika Chemicals Co., Ltd.
- 当前专利权人: Japan Advanced Institute of Science and Technology,Sumitomo Seika Chemicals Co., Ltd.
- 当前专利权人地址: 1-1, Asahidai Nomi-shi Ishikawa 923-1292 JP
- 代理机构: Horn Kleimann Waitzhofer Patentanwälte PartG mbB
- 优先权: JP2013259031 20131216
- 国际公布: WO2015093455 20150625
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; C08G64/02 ; H01L21/28 ; H01L29/786
摘要:
It is an object of the invention to provide a thin film transistor and a method for producing the same, which will easily achieve self-aligned formation of a source/drain region without through processes under a vacuum or a low pressure or with no use of expensive equipment. An exemplary method for producing a thin film transistor according to the invention includes an aliphatic polycarbonate layer forming step of forming an aliphatic polycarbonate layer 50 that covers a gate electrode layer 40 disposed above a semiconductor layer 20 with a gate insulator 30 being interposed between the gate electrode layer 40 and the semiconductor layer 20, and also covers the semiconductor layer 20, and has a dopant causing the semiconductor layer 20 to become an n-type or p-type semiconductor layer, and a heating step of heating at a temperature causing introduction of the dopant into the semiconductor layer 20 and decomposition of the aliphatic polycarbonate layer 50.
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