- 专利标题: ROTARY X-RAY TARGET ASSEMBLY
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申请号: EP16181644.2申请日: 2014-03-12
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公开(公告)号: EP3109886B1公开(公告)日: 2018-08-15
- 发明人: Hadland, Roger
- 申请人: Nikon Metrology NV
- 申请人地址: Geldenaaksebaan 329 3001 Leuven BE
- 专利权人: Nikon Metrology NV
- 当前专利权人: Nikon Metrology NV
- 当前专利权人地址: Geldenaaksebaan 329 3001 Leuven BE
- 代理机构: Hoffmann Eitle
- 优先权: US201361787930P 20130315; GB201304870 20130315
- 主分类号: H01J35/02
- IPC分类号: H01J35/02 ; H01J35/04 ; H01J35/10 ; H05G1/12 ; H02M7/10
摘要:
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
公开/授权文献
- EP3109886A1 ROTARY TARGET ASSEMBLY AND X-RAY GUN 公开/授权日:2016-12-28
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