发明公开
EP3126068A1 HYPERBARIC METHODS AND SYSTEMS FOR SURFACE TREATMENT, CLEANING, AND DRYING: THIN LIQUID H-CNX
审中-公开
HYPERBARISCHE VERFAHREN UND SYSTEME ZUROBERFLÄCHENBEHANDLUNG，-REINIGUNG UND -TROCKNUNG：DÜNNFLÜSSIGEH-CNX
- 专利标题： HYPERBARIC METHODS AND SYSTEMS FOR SURFACE TREATMENT, CLEANING, AND DRYING: THIN LIQUID H-CNX
- 专利标题（中）： HYPERBARISCHE VERFAHREN UND SYSTEME ZUROBERFLÄCHENBEHANDLUNG，-REINIGUNG UND -TROCKNUNG：DÜNNFLÜSSIGEH-CNX
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申请号： EP14814322.5申请日： 2014-06-18
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公开(公告)号： EP3126068A1公开(公告)日： 2017-02-08
- 发明人: PLAVIDAL, Richard W.
- 申请人： Se2quel Management GmbH
- 申请人地址： Industriestrasse 40/1 75417 Mühlacker DE
- 专利权人： Se2quel Management GmbH
- 当前专利权人： Se2quel Management GmbH
- 当前专利权人地址： Industriestrasse 40/1 75417 Mühlacker DE
- 代理机构： Himmelsbach, Mathias
- 优先权： US201361836653P 20130618
- 国际公布： WO2014205143 20141224
- 主分类号： B08B3/04
- IPC分类号： B08B3/04 ; B08B3/10 ; B08B7/04 ; H01L21/302 ; H01L21/304
摘要：
Objects with complex surface profiles can be cleaned effectively using hyperbaric pressures. A high temperature high pressure liquid or vapor can be introduced to a sealed chamber containing an object to be cleaned, forming a thin liquid layer on the object. The pressure in the sealed chamber can be quickly reduced, evaporating the thin liquid layer, which can remove surface contaminants from the object. The process can be repeated until the object is cleaned.
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