发明公开
EP3128536A1 METHOD FOR POLISHING GAN SINGLE CRYSTAL MATERIAL
审中-公开
VERFAHREN ZUM POLIEREN VON GAN-EINZELKRISTALLMATERIAL
- 专利标题: METHOD FOR POLISHING GAN SINGLE CRYSTAL MATERIAL
- 专利标题(中): VERFAHREN ZUM POLIEREN VON GAN-EINZELKRISTALLMATERIAL
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申请号: EP15774319.6申请日: 2015-03-26
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公开(公告)号: EP3128536A1公开(公告)日: 2017-02-08
- 发明人: SATO Makoto , OMORI Wataru , TAKAHASHI Maiko
- 申请人: Noritake Co., Limited
- 申请人地址: 1-36, Noritake-shinmachi 3-chome Nishi-ku Nagoya-shi Aichi 451-8501 JP
- 专利权人: Noritake Co., Limited
- 当前专利权人: Noritake Co., Limited
- 当前专利权人地址: 1-36, Noritake-shinmachi 3-chome Nishi-ku Nagoya-shi Aichi 451-8501 JP
- 代理机构: TBK
- 优先权: JP2014074202 20140331
- 国际公布: WO2015152021 20151008
- 主分类号: H01L21/304
- IPC分类号: H01L21/304 ; B24B37/00 ; B24B37/24 ; B24D3/32 ; C08L63/00 ; C08L81/06 ; C09K3/14
摘要:
Provided is a method for polishing a single crystal substrate composed of gallium nitride GaN, which is a material that cannot be processed easily, by a CMP process with satisfactory polishing efficiency and satisfactory polishing performance. In the polishing by a CMP process, the surface of a single crystal substrate composed of gallium nitride GaN is polished using an abrasive-grain-containing polishing pad in the presence of an acidic polishing solution. In this manner, high polishing efficiency can be achieved properly while keeping the surface roughness at a low level. The polishing solution is an acidic polishing solution having an oxidation-reduction potential ranging from Ehmin mV (wherein Ehmin is a value determined in accordance with formula (1)) to Ehmax mV (wherein Ehmax is a value determined in accordance with formula (2)) and a pH value of 0.1 to 6.5. (1) Ehmin (mV) =-33.9pH + 750 (2) Ehmax (mV) = -82.1pH + 1491
公开/授权文献
- EP3128536B1 METHOD FOR POLISHING GAN SINGLE CRYSTAL MATERIAL 公开/授权日:2022-01-19
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