发明公开
- 专利标题: COMPOSITION FOR POLISHING SILICON WAFERS
- 专利标题(中): 抛光硅晶片的组成
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申请号: EP15780524.3申请日: 2015-04-07
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公开(公告)号: EP3133639A1公开(公告)日: 2017-02-22
- 发明人: TSUCHIYA, Kohsuke , TANSHO, Hisanori , MORI, Yoshio
- 申请人: Fujimi Incorporated
- 申请人地址: 1-1 Chiryo 2-chome Nishibiwajima-cho Nishikasugai-gun, Aichi 452-8502 JP
- 专利权人: Fujimi Incorporated
- 当前专利权人: Fujimi Incorporated
- 当前专利权人地址: 1-1 Chiryo 2-chome Nishibiwajima-cho Nishikasugai-gun, Aichi 452-8502 JP
- 代理机构: Grünecker Patent- und Rechtsanwälte PartG mbB
- 优先权: JP2014082951 20140414
- 国际公布: WO2015159507 20151022
- 主分类号: H01L21/304
- IPC分类号: H01L21/304 ; B24B37/00 ; C09K3/14 ; H01L21/321
摘要:
Provided is a silicon wafer polishing composition having an excellent effect of reducing the haze on the surface of silicon wafers and excellent filterability. The composition for polishing silicon wafers provided here includes a silicon-wafer polishing accelerator, an amido group-containing polymer X, an organic compound Y having no amido group, and water. The amido group-containing polymer X has, on the main chain, a building block A derived from a monomer represented by General Formula (1). The relation between the molecular weight M x of the amido group-containing polymer X and the molecular weight M y of the organic compound Y satisfies the expression: 200 ≤ M y x .
公开/授权文献
- EP3133639B1 COMPOSITION FOR POLISHING SILICON WAFERS 公开/授权日:2019-06-26
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