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发明公开
EP3144987A1 FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER 审中-公开
FERRO电薄膜具有压电薄膜，压电传动器，喷墨头和喷墨基底

  • 专利标题： FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER
  • 专利标题（中）： FERRO电薄膜具有压电薄膜，压电传动器，喷墨头和喷墨基底
  • 申请号： EP15792322.8
    申请日： 2015-04-27
  • 公开(公告)号： EP3144987A1
    公开(公告)日： 2017-03-22
  • 发明人: MAWATARI Kenji
  • 申请人： Konica Minolta, Inc.
  • 申请人地址： 2-7-2, Marunouchi Chiyoda-ku Tokyo 100-7015 JP
  • 专利权人： Konica Minolta, Inc.
  • 当前专利权人： Konica Minolta, Inc.
  • 当前专利权人地址： 2-7-2, Marunouchi Chiyoda-ku Tokyo 100-7015 JP
  • 代理机构： Henkel, Breuer & Partner
  • 优先权： JP2014101152 20140515
  • 国际公布： WO2015174265 20151119
  • 主分类号： H01L41/187
  • IPC分类号： H01L41/187 ;  B41J2/14 ;  H01L41/09 ;  H01L41/319
FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND INKJET PRINTER
摘要：
This ferroelectric thin film comprises lead zirconate titanate niobate. In said ferroelectric thin film, the ratio (a) of number of moles of lead to the total number of moles of zirconium, titanium, and niobium is greater than or equal to 100%; the ratio (b) of the number of moles of niobium to the total number of moles of zirconium, titanium, and niobium is between 10% and 20%, inclusive; and the ratio (c) of the number of moles of zirconium to the total number of moles of zirconium and titanium is between 52% and 59%, inclusive. The film stress exhibited by the ferroelectric thin film is between 100 and 250 MPa, inclusive.
摘要（中）：

该强电介质薄膜包括锆钛酸铅铌酸。 在所述强电介质薄膜中，（a）的铅的摩尔数相对于锆，钛，和铌的摩尔总数之比大于或等于100％; 铌的摩尔数相对于锆，钛，和铌的摩尔总数之比（b）为10％和20％（含）之间; 和锆的摩尔数相对于锆和钛的摩尔总数之比（c）是52％和59％（含）之间。 通过该铁电薄膜表现出的膜应力为100兆帕和250之间，包括端值。

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