发明公开
EP3162901A1 HEAT TREATMENT APPARATUS 审中-公开
WÄRMEBEHANDLUNGSVORRICHTUNG

HEAT TREATMENT APPARATUS
摘要:
A heat treatment apparatus (S1) includes a cooling chamber (3a) configured to perform cooling of a treatment object (X), a conveyance chamber (1) installed above the cooling chamber (3a) and configured to convey the treatment object (X), a lift table (3d) on which the treatment object (X) is placed, and a lift mechanism (7) having a driving apparatus (7a) installed above the lift table (3d) and configured to raise and lower the lift table (3d) between the cooling chamber (3a) and the conveyance chamber (1) using the driving apparatus (7a).
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