用于清洁表面的微电子模块进行说明。 所述微电子模块包括至少一个电压转换器，用于提供到一个更高，更低的或相同的第二电压的第一电压。 因此，该模块包括至少一个执行机构。 致动器包括至少一个发电机在离子电流产生电等离子体，高次谐波成分和/或从所述第二电压的静电场的所有其由所述电压转换器提供。 至少所述电压转换器和所述致动器被设置在薄膜的平面基片。 至少大部分的至少一个对象粘附到表面上的由致动器去除。

Disclosed is a microelectronic module (100) for cleaning a surface. The microelectronic module has at least one voltage converter (101) for converting a supplied first voltage (V1) to a higher, lower or identical second voltage (V2). Next, the module comprises at least one actuator (102). The actuator has at least one generator (103) for generating an ion current of an electric plasma, surface waves and / or an electrostatic field from the description provided by the voltage converter second voltage. At least the voltage converter and the actuator are disposed on a common thin-film-area substrate (104). By means of the actuator, the at least predominant removal is at least one adhering to the surface object.