发明公开
EP3165485A1 APPARATUS AND METHOD FOR POSITIONING A SUBSTRATE ON A SUPPORT BODY
审中-公开
装置和方法用于定位基板在载体上
- 专利标题: APPARATUS AND METHOD FOR POSITIONING A SUBSTRATE ON A SUPPORT BODY
- 专利标题(中): 装置和方法用于定位基板在载体上
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申请号: EP16195801.2申请日: 2016-10-26
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公开(公告)号: EP3165485A1公开(公告)日: 2017-05-10
- 发明人: NIJKAMP, Aart
- 申请人: OCE-Technologies B.V.
- 申请人地址: P.O. Box 101 St. Urbanusweg 43 5914 CA Venlo NL
- 专利权人: OCE-Technologies B.V.
- 当前专利权人: OCE-Technologies B.V.
- 当前专利权人地址: P.O. Box 101 St. Urbanusweg 43 5914 CA Venlo NL
- 代理机构: OCE IP Department
- 优先权: EP15192773 20151103
- 主分类号: B65H9/04
- IPC分类号: B65H9/04 ; B41J13/26
摘要:
An apparatus (100) is provided for positioning a substrate (S) on a support body (14). The apparatus comprises the support body for supporting the substrate, at least one registration element (20a), wherein said at least one registration element is positioned and arranged for registering the substrate in a preselected position (22a) on the support body when brought into a registering state. The apparatus further comprises a registration actuator (120) movably arranged with respect to the support body for selectively arranging a registration element into the registering state.
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