FILTERCHIP UND VERFAHREN ZUR HERSTELLUNG EINES FILTERCHIPS
摘要:
The invention relates to a filter chip (1) comprising an interconnection of at least one first resonator (2) operating by means of acoustic bulk waves, to a second resonator (3) operating by means of acoustic bulk waves. The first resonator (2) operating by means of acoustic bulk waves has a first piezoelectric layer (4) that is structured such that the resonance frequency of the first resonator (2) is lower than that of the second resonator (3). The first piezoelectric layer (4) and/or a second piezoelectric layer (7) of the second resonator (3) operating by means of acoustic bulk waves can be structured such that grooves (14) extend in a vertical direction through the first and/or second piezoelectric layer.
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