发明公开
EP3188307A1 HIGH PERFORMANCE SWITCH FOR MICROWAVE MEMS 审中-公开
用于微波MEMS的高性能开关

HIGH PERFORMANCE SWITCH FOR MICROWAVE MEMS
摘要:
The present disclosure provides for a microelectromechanical switch including a first port (e.g., input port), one or more second ports (e.g., output ports), a cantilever beam, and a mechanical spring connected to the cantilever beam for providing a mechanical force to move the cantilever beam. The cantilever beam extends from a first end, which is in contact with either the first port or one of the second ports, to a second end that is switchably connectable to the other of the first port or said one of the second ports. The first and second ports and cantilever beam may be formed in a coplanar waveguide.
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