发明公开
EP3207772A1 LLIFT PRINTING OF CONDUCTIVE TRACES ONTO A SEMICONDUCTOR SUBSTRATE
审中-公开
将传导性迹线印刷到半导体衬底上
- 专利标题: LLIFT PRINTING OF CONDUCTIVE TRACES ONTO A SEMICONDUCTOR SUBSTRATE
- 专利标题(中): 将传导性迹线印刷到半导体衬底上
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申请号: EP15852999.0申请日: 2015-10-19
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公开(公告)号: EP3207772A1公开(公告)日: 2017-08-23
- 发明人: ZENOU, Michael , KOTLER, Zvi
- 申请人: Orbotech Ltd.
- 申请人地址: P.O.Box 215 8110101 Yavne IL
- 专利权人: Orbotech Ltd.
- 当前专利权人: Orbotech Ltd.
- 当前专利权人地址: P.O.Box 215 8110101 Yavne IL
- 代理机构: Wynne-Jones, Lainé and James LLP
- 优先权: US201414062065 20141019
- 国际公布: WO2016063270 20160428
- 主分类号: H05K3/04
- IPC分类号: H05K3/04 ; H01L21/26 ; C23C14/48 ; C23C14/04 ; H05K3/46
摘要:
A method for metallization includes providing a transparent donor substrate (34) having deposited thereon a donor film (36) including a metal with a thickness less than 2 pm. The donor substrate is positioned in proximity to an acceptor substrate (22) including a semiconductor material with the donor film facing toward the acceptor substrate and with a gap of at least 0.1 mm between the donor film and the acceptor substrate. A train of laser pulses, having a pulse duration less than 2 ns, is directed to impinge on the donor substrate so as to cause droplets (44) of the metal to be ejected from the donor layer and land on the acceptor substrate, thereby forming a circuit trace (25) in ohmic contact with the semiconductor material.
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