发明公开
EP3232204A1 METHOD OF TUNING PARAMETER SETTINGS FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY FOR SUBSURFACE IMAGING, SCANNING PROBE MICROSCOPY SYSTEM, AND COMPUTER PROGRAM PRODUCT
审中-公开
调整参数设置的方法,以执行用于地下成像,扫描探针显微系统和计算机程序产品的声学扫描探针显微镜
- 专利标题: METHOD OF TUNING PARAMETER SETTINGS FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY FOR SUBSURFACE IMAGING, SCANNING PROBE MICROSCOPY SYSTEM, AND COMPUTER PROGRAM PRODUCT
- 专利标题(中): 调整参数设置的方法,以执行用于地下成像,扫描探针显微系统和计算机程序产品的声学扫描探针显微镜
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申请号: EP16165256.5申请日: 2016-04-14
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公开(公告)号: EP3232204A1公开(公告)日: 2017-10-18
- 发明人: Sadeghian Marnani, Hamed , Meijer Timmerman Thijssen, Rutger , van Es, Maarten Hubertus
- 申请人: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 申请人地址: Anna van Buerenplein 1 2595 DA 's-Gravenhage NL
- 专利权人: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 当前专利权人: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 当前专利权人地址: Anna van Buerenplein 1 2595 DA 's-Gravenhage NL
- 代理机构: V.O.
- 主分类号: G01Q40/00
- IPC分类号: G01Q40/00 ; G01Q60/32 ; G01N29/06
摘要:
This document relates to a method of tuning a scanning probe microscopy system and system therefore. The system comprising a sample carrier and a probe with a probe tip, and is configured for positioning the probe tip relative to a sample. The system further includes a transducer, a sensor for sensing probe tip vibrations, and a controller. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to the sample; b) at a first position of the probe tip, controlling the transducer to sweep the first frequency across a first frequency range, and obtaining a first probe tip sensor signal; c) at a second position of the probe tip, controlling the transducer to sweep the first frequency across at least said first frequency range, and obtaining a second probe tip sensor signal; d) analyzing the first and second sensor signal to obtain a difference characteristic dependent on the first frequency, and selecting a first frequency value for which the difference characteristic exceeds a threshold for tuning the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.
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