发明公开
- 专利标题： MONODISPERSE MICRO-STRUCTURE OR NANO-STRUCTURE PRODUCT
- 专利标题（中）： 单分散微结构或纳米结构产品
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申请号： EP17156921.3申请日： 2004-12-20
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公开(公告)号： EP3242318A1公开(公告)日： 2017-11-08
- 发明人: DESIMONE, Joseph M. , ROLLAND, Jason P. , EXNER, Ansley E. , SAMULSKI, Edward T. , SAMULSKI, R. Jude , MAYNOR, Benjamin W. , EULISS, Larken E. , DENISON, Ginger M.
- 申请人： The University of North Carolina at Chapel Hill
- 申请人地址： 308 Bynum Hall Campus Box 4105 Chapel Hill, NC 27599-4105 US
- 专利权人： The University of North Carolina at Chapel Hill
- 当前专利权人： The University of North Carolina at Chapel Hill
- 当前专利权人地址： 308 Bynum Hall Campus Box 4105 Chapel Hill, NC 27599-4105 US
- 代理机构： Johnson, Yvonne Catherine
- 优先权： US531531P 20031219; US583170P 20040625; US604970P 20040827
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; G03F7/00 ; A61K9/51
摘要：
The presently disclosed subject matter describes the use of fluorinated elastomer-based materials, in particular perfluoropolyether (PFPE)-based materials, in high-resolution soft or imprint lithographic applications, such as micro- and nanoscale replica molding, and the first nano-contact molding of organic materials to generate high fidelity features using an elastomeric mold. Accordingly, the presently disclosed subject matter describes a method for producing free-standing, isolated nanostructures of any shape using soft or imprint lithography techniques.
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