发明公开
- 专利标题： RESONANCE MEMS MIRROR CONTROL SYSTEM
- 专利标题（中）： 谐振式MEMS镜面控制系统
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申请号： EP17162674.0申请日： 2017-03-23
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公开(公告)号： EP3290985A1公开(公告)日： 2018-03-07
- 发明人: SOURANI, Sason
- 申请人： STMicroelectronics Ltd
- 申请人地址： 7th, Glborei Isreal Street Adar Building New Industrial Zone 42507 Netanya IL
- 专利权人： STMicroelectronics Ltd
- 当前专利权人： STMicroelectronics Ltd
- 当前专利权人地址： 7th, Glborei Isreal Street Adar Building New Industrial Zone 42507 Netanya IL
- 代理机构： Cerbaro, Elena
- 优先权： US201615256909 20160906
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; G09G3/34 ; G09G3/02 ; H02P25/032 ; G01D5/241
摘要：
The present invention provides a system and method for controlling operation of a resonance MEMS mirror (1901). The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting (1915) current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.
公开/授权文献
- EP3290985B1 RESONANCE MEMS MIRROR CONTROL SYSTEM 公开/授权日：2019-12-11
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