发明公开
EP3292441A1 FACETTENSPIEGEL FÜR DIE EUV-PROJEKTIONSLITHOGRAPHIE SOWIE BELEUCHTUNGSOPTIK MIT EINEM DERARTIGEN FACETTENSPIEGEL
审中-公开
用于EUV投影光刻和照明光学设备的FACET MIRRORS
- 专利标题: FACETTENSPIEGEL FÜR DIE EUV-PROJEKTIONSLITHOGRAPHIE SOWIE BELEUCHTUNGSOPTIK MIT EINEM DERARTIGEN FACETTENSPIEGEL
- 专利标题(英): EP3292441A1 - Faceted mirror for euv projection lithography and illumination optical unit comprising such a faceted mirror
- 专利标题(中): 用于EUV投影光刻和照明光学设备的FACET MIRRORS
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申请号: EP16718368.0申请日: 2016-04-26
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公开(公告)号: EP3292441A1公开(公告)日: 2018-03-14
- 发明人: FISCHER, Thomas , WUNDERLICH, Sarina
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 代理机构: Rau, Schneck & Hübner Patentanwälte Rechtsanwälte PartGmbB
- 优先权: DE102015208514 20150507
- 国际公布: WO2016177599 20161110
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G02B26/08 ; G02B5/08 ; G02B5/09
摘要:
A faceted mirror for EUV projection lithography has a plurality of facets (25) for reflecting EUV illumination light. At least some of the facets (25) are produced as orientation facets and have a reflection surface (32), the edge contour (33) of which is oriented along two orientation coordinates (x, y) of a facet overall arrangement. The reflection surface (32) of at least one of the orientation facets (25) has a surface shape which has different curvatures along two axes of curvature (x', y'), wherein said axes of curvature (x', y') are tilted about an end axis tilt angle (α, β) in relation to the orientation coordinates (x, y) of the facet overall arrangement. A faceted mirror is achieved, the EUV performance of which is increased in particular when a projection illumination system fitted with said faceted mirror is operated for longer.
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