Invention Publication
EP3292441A1 FACETTENSPIEGEL FÜR DIE EUV-PROJEKTIONSLITHOGRAPHIE SOWIE BELEUCHTUNGSOPTIK MIT EINEM DERARTIGEN FACETTENSPIEGEL
审中-公开
用于EUV投影光刻和照明光学设备的FACET MIRRORS
- Patent Title: FACETTENSPIEGEL FÜR DIE EUV-PROJEKTIONSLITHOGRAPHIE SOWIE BELEUCHTUNGSOPTIK MIT EINEM DERARTIGEN FACETTENSPIEGEL
- Patent Title (English): EP3292441A1 - Faceted mirror for euv projection lithography and illumination optical unit comprising such a faceted mirror
- Patent Title (中): 用于EUV投影光刻和照明光学设备的FACET MIRRORS
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Application No.: EP16718368.0Application Date: 2016-04-26
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Publication No.: EP3292441A1Publication Date: 2018-03-14
- Inventor: FISCHER, Thomas , WUNDERLICH, Sarina
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- Agency: Rau, Schneck & Hübner Patentanwälte Rechtsanwälte PartGmbB
- Priority: DE102015208514 20150507
- International Announcement: WO2016177599 20161110
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/08 ; G02B5/08 ; G02B5/09

Abstract:
A faceted mirror for EUV projection lithography has a plurality of facets (25) for reflecting EUV illumination light. At least some of the facets (25) are produced as orientation facets and have a reflection surface (32), the edge contour (33) of which is oriented along two orientation coordinates (x, y) of a facet overall arrangement. The reflection surface (32) of at least one of the orientation facets (25) has a surface shape which has different curvatures along two axes of curvature (x', y'), wherein said axes of curvature (x', y') are tilted about an end axis tilt angle (α, β) in relation to the orientation coordinates (x, y) of the facet overall arrangement. A faceted mirror is achieved, the EUV performance of which is increased in particular when a projection illumination system fitted with said faceted mirror is operated for longer.
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