A roll to roll fabrication apparatus (100, 200) includes: a vacuum chamber having an installation chamber (110, 210) and a process chamber (120, 220); a preprocessing unit (160, 260) in the installation chamber (110, 210) to process a surface of a film (101, 201) which is transferred to enhance a film (101, 201) characteristic in a subsequent CVD process; a process drum (130, 230) in the process chamber (120, 220) to wind the film (101, 201) thereon; a process treatment unit (132, 232) in the process chamber (120, 220) to form a layer by performing a CVD process on the film (101, 201) wound on the process drum (130, 230); and a plurality of heaters (170a, 170b, 170c; 270a, 270b, 270c) in the installation chamber (110, 210) and the process chamber (120, 220) to gradually increase a temperature of the film (101, 201) wound on the process drum (130, 230) to prevent application of a thermal impact to the film (101, 201) due to the high-temperature process drum (130, 230).