- 专利标题: THIN-FILM TRANSISTOR STRUCTURE HAVING THREE-DIMENSIONAL FIN-SHAPED CHANNEL AND MANUFACTURING METHOD THEREOF
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申请号: EP16832284.0申请日: 2016-07-30
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公开(公告)号: EP3333899A1公开(公告)日: 2018-06-13
- 发明人: WANG, Kai , OU, Hai , CHEN, Jun
- 申请人: Sun Yat-Sen University , Sun Yat-Sen University Carnegie Mellon University
- 申请人地址: Cai, Ming No. 135 Xingang Xi Road Haizhu Guangdong, Guangdong 510275 CN
- 专利权人: Sun Yat-Sen University,Sun Yat-Sen University Carnegie Mellon University
- 当前专利权人: Sun Yat-Sen University,Sun Yat-Sen University Carnegie Mellon University
- 当前专利权人地址: Cai, Ming No. 135 Xingang Xi Road Haizhu Guangdong, Guangdong 510275 CN
- 代理机构: Bergmeier, Werner
- 优先权: CN201510472392 20150804
- 国际公布: WO2017020796 20170209
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
A thin-film transistor structure having a three-dimensional (3D) fin-shaped channel and a manufacturing method thereof. The manufacturing method comprises the following steps: (a) depositing a bottom gate (2) on a substrate (1) and etching the same; (b) depositing a bottom dielectric layer (3) at an upper portion of a structure obtained from Step (a), and consecutively depositing semiconductor thin film layers on the bottom dielectric layer (3); (c) etching the semiconductor thin film layers to obtain a fin-shaped channel (4); (d) respectively depositing an ohmic contact layer (9), a source (5), and a drain (6) on two sides of the semiconductor thin film layers and etching the same; (e) depositing a top dielectric layer (7) and top gate (8) on an upper portion of a structure obtained from Step (d); and (f) etching the top gate (8), thereby completing manufacturing of a thin-film transistor having the two gates and the 3D fin-shaped channel. The resultant transistor has an increased thickness of a channel region semiconductor thin-film, and reduces a thickness of a source or drain region semiconductor thin-film, thereby realizing a preferred light absorption and switching property.
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