- 专利标题： DETERMINING INTERACTION FORCES IN A DYNAMIC MODE AFM DURING IMAGING
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申请号： EP16760818.1申请日： 2016-08-17
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公开(公告)号： EP3338097A1公开(公告)日： 2018-06-27
- 发明人: SADEGHIAN MARNANI, Hamed , TAMER, Mehmet Selman
- 申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 申请人地址： Anna van Buerenplein 1 2595 DA 's-Gravenhage NL
- 专利权人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 当前专利权人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 当前专利权人地址： Anna van Buerenplein 1 2595 DA 's-Gravenhage NL
- 代理机构： V.O.
- 优先权： EP15181449 20150818
- 国际公布： WO2017030439 20170223
- 主分类号： G01Q40/00
- IPC分类号： G01Q40/00 ; G01Q60/34
摘要：
A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).
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