- 专利标题: PROCEDE DE GREFFAGE DE FILM MINCE POLYMERIQUE SUR SUBSTRAT ET PROCEDE DE METALLISATION DE CE FILM MINCE
- 专利标题(英): EP3359306A2 - Process for grafting a polymeric thin film onto a substrate and process for metallizing this thin film
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申请号: EP16794688.8申请日: 2016-10-07
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公开(公告)号: EP3359306A2公开(公告)日: 2018-08-15
- 发明人: VIEL, Pascal , SUHR, Dominique , BARRAL, Geoffrey
- 申请人: Aveni , Commissariat à l'Energie Atomique et aux Energies Alternatives
- 申请人地址: 15, rue du Buisson aux Fraises Z.I. de la Bonde 91300 Massy FR
- 专利权人: Aveni,Commissariat à l'Energie Atomique et aux Energies Alternatives
- 当前专利权人: Aveni,Commissariat à l'Energie Atomique et aux Energies Alternatives
- 当前专利权人地址: 15, rue du Buisson aux Fraises Z.I. de la Bonde 91300 Massy FR
- 代理机构: Cabinet Beau de Loménie
- 优先权: FR1559596 20151008
- 国际公布: WO2017060656 20170413
- 主分类号: B05D1/18
- IPC分类号: B05D1/18 ; C23C18/18
摘要:
One subject of the present invention is a non-electrochemical process for radical grafting of a polymer to a solid, organic or inorganic and insulating, electrically conductive or electrically semiconductive substrate, which process comprises - bringing said substrate into contact with the polymer in solution via an immersion-emersion, a contact coating, or a spray coating, and - heat treating the polymer-covered substrate obtained in the preceding step at a temperature between 70°C and 450°C; said polymer not being a polymer based on acrylic acid. The invention also relates to a process for metallizing the solid, organic or inorganic substrate coated by the polymer film, which metallizing may be carried out via a dry or wet route. This process particularly finds an application in the metallization of through vias for the manufacture of semiconductor devices.
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