Invention Publication
EP3367152A1 MICROSCOPE
审中-公开
- Patent Title: MICROSCOPE
-
Application No.: EP15906635.6Application Date: 2015-10-19
-
Publication No.: EP3367152A1Publication Date: 2018-08-29
- Inventor: MIYAKE, Norio , SUZUKI, Fumio , NAKAYAMA, Hiroaki
- Applicant: Nikon Corporation
- Applicant Address: 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 JP
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 JP
- Agency: Hoffmann Eitle
- International Announcement: WO2017068627 20170427
- Main IPC: G02B21/06
- IPC: G02B21/06
Abstract:
A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n 1 ) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n 2 ) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number n 1 may be greater than a number n 2 with respect to the first objective lens.
Public/Granted literature
- EP3367152B1 MICROSCOPE Public/Granted day:2024-12-11
Information query