DEVICE FOR CLEANING SURFACE USING ELECTROWETTING ELEMENT AND METHOD FOR CONTROLLING THE SAME
摘要:
A device (100) for cleaning an object (O) surface, including a substrate (110) provided on the object surface, a plurality of electrodes (120) provided on the substrate (110), a dielectric layer (130) provided on the substrate (110) to cover the electrodes (120), and a control device (400) supplying an alternating-current (AC) power to the electrodes (120) including supplying a first AC power having a predetermined first frequency and a predetermined first voltage to the electrodes (120) during a first time period to vibrate a droplet (D) on the surface of the object (O) by a periodic change of an electrostatic force generated at the electrodes (120), the first frequency being set to the resonant frequency of the liquid droplet (D).
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