- 专利标题: SEMICONDUCTOR DEVICES COMPRISING A PINNED PHOTODIODE STRUCTURE
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申请号: EP17738734.7申请日: 2017-01-16
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公开(公告)号: EP3403284A1公开(公告)日: 2018-11-21
- 发明人: BUETTGEN, Bernhard , KÖKLÜ, Gözen , LOELIGER, Theodor WALTER
- 申请人: Heptagon Micro Optics Pte. Ltd.
- 申请人地址: 26 Woodlands Loop Singapore 738317 SG
- 专利权人: Heptagon Micro Optics Pte. Ltd.
- 当前专利权人: Heptagon Micro Optics Pte. Ltd.
- 当前专利权人地址: 26 Woodlands Loop Singapore 738317 SG
- 代理机构: Conroy, John
- 优先权: US201662279076P 20160115
- 国际公布: WO2017123159 20170720
- 主分类号: H01L31/0352
- IPC分类号: H01L31/0352 ; H01L21/265 ; H01L21/329 ; H01L21/33 ; H01L31/11 ; H01L31/111
摘要:
A semiconductor device operable to demodulate incident modulated electromagnetic radiation, the semiconductor device comprising: a pinned photodiode structure including a substrate of a first type, an implant layer of a second type disposed within the substrate, first and second auxiliary implant layers of the second type disposed within the substrate and each disposed adjacent to the implant layer of the second type, an implant layer of the first type disposed within the implant layer of the second type and extending into the first and second auxiliary implant layers of the second type, an insulator disposed on a surface of the substrate, and a photo-detection region; first and second transfer gates disposed on a surface of the insulator, the transfer gates being operable to generate a field within the substrate; and first and second floating diffusion implant layers of the second type disposed within the substrate.
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