- 专利标题: SUBSTRATE MANUFACTURING METHOD
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申请号: EP19161290.2申请日: 2019-03-07
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公开(公告)号: EP3536437B1公开(公告)日: 2021-09-29
- 发明人: IKENO, Junichi , YAMADA, Yohei , SUZUKI, Hideki , NOGUCHI, Hitoshi
- 专利权人: Shin-Etsu Polymer Co., Ltd.,Shin-Etsu Chemical Co., Ltd.,National University Corporation Saitama University
- 当前专利权人: Shin-Etsu Polymer Co., Ltd.,Shin-Etsu Chemical Co., Ltd.,National University Corporation Saitama University
- 当前专利权人地址: 1-9, Kanda-Sudacho Chiyoda-ku Tokyo 101-0041 JP; 6-1, Ohtemachi 2-chome, Chiyoda-ku, Tokyo 100-0004 JP; 255, Shimo-Okubo Sakura-ku Saitama City, Saitama 338-8570 JP
- 代理机构: SSM Sandmair
- 优先权: JP2018043006 20180309
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; B23K26/08 ; B23K26/53 ; C03B33/06 ; C03B29/16 ; B23K101/18 ; B23K101/40 ; B23K103/08
公开/授权文献
- EP3536437A1 SUBSTRATE MANUFACTURING METHOD 公开/授权日:2019-09-11
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