发明公开
- 专利标题: CYCLONE COLLECTOR
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申请号: EP18808720.9申请日: 2018-01-29
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公开(公告)号: EP3632571A1公开(公告)日: 2020-04-08
- 发明人: TAMURA, Akitake
- 申请人: Tokyo Electron Limited
- 申请人地址: 3-1 Akasaka 5-chome Minato-ku Tokyo 107-6325 JP
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: 3-1 Akasaka 5-chome Minato-ku Tokyo 107-6325 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2017108770 20170531
- 国际公布: WO2018220896 20181206
- 主分类号: B04C5/04
- IPC分类号: B04C5/04 ; B01D47/00 ; B04C11/00 ; G01N1/02
摘要:
There is provided a cyclone collector which can securely collect particles from an intake gas and can prevent discharge of a water mist. The cyclone collector 12 includes a container 21, a liquid-film forming section 23 for forming a liquid film 40 in the container 21, a gas inlet 33 provided in a lid 32, and an exhaust pipe 24b. The gas inlet 33 extends downward at an angle with an orthogonal plane 21B perpendicular to the axis 21A of the container 21. The opening 33a of the gas inlet 33 opens in an area at a distance from the liquid film 40. An intake gas is ejected from the gas inlet 33 toward the liquid film 40.
公开/授权文献
- EP3632571B1 CYCLONE COLLECTOR 公开/授权日:2024-09-11
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