- 专利标题: MULTI-RAY-SOURCE ACCELERATOR AND INSPECTION METHOD
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申请号: EP20186259.6申请日: 2020-07-16
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公开(公告)号: EP3768049A1公开(公告)日: 2021-01-20
- 发明人: KANG, Kejun , CHEN, Huaibi , LIU, Yaohong , TANG, Chuanxiang , LI, Yuanjing , ZHA, Hao , ZHANG, Liang
- 申请人: Tsinghua University , Nuctech Company Limited
- 申请人地址: CN Haidian District, Beijing 100084 No. 1, Tsinghua Yuan,; CN Beijing 100084 2nd Floor, Block A Tongfang Building Shuangqinglu Haidian District
- 代理机构: Cabinet Beau de Loménie
- 优先权: CN201910644153 20190716
- 主分类号: H05H7/18
- IPC分类号: H05H7/18 ; H05H9/04 ; G01V5/00 ; G01V5/08
摘要:
Embodiments of the disclosure provide a multi-ray-source accelerator and an inspection method. The multi-ray-source accelerator includes: a plurality of acceleration tubes, each acceleration tube of the plurality of acceleration tubes including an acceleration tube body (12) that defines at least one cavity (11), the plurality of acceleration tubes being arranged in at least one row along a straight line or an arc and connected in series with each other; and a microwave unit (6) configured to provide a microwave field to the plurality of acceleration tubes. The plurality of acceleration tubes are arranged to allow the microwave unit to provide the microwave field from an acceleration tube at one end of the plurality of acceleration tubes so as to accelerate electron beams in cavities of all the acceleration tubes.
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