- 专利标题: VARIABLE REDUCTION RATIO SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, WIDE ANGLE ENERGY ANALYZER, AND TWO-DIMENSIONAL ELECTRON SPECTROMETER
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申请号: EP19799637.4申请日: 2019-05-08
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公开(公告)号: EP3792950A1公开(公告)日: 2021-03-17
- 发明人: MATSUDA, Hiroyuki , DAIMON, Hiroshi , Toth Laszlo
- 申请人: National University corporation Nara Institute of Science and Technology
- 申请人地址: JP Ikoma-shi Nara 630-0192 8916-5, Takayama-cho
- 代理机构: Fleck, Hermann-Josef
- 优先权: JP2018091020 20180509
- 国际公布: WO2019216348 20191114
- 主分类号: H01J37/12
- IPC分类号: H01J37/12 ; G01N23/2273 ; G01N23/2276 ; H01J37/153 ; H01J37/252
摘要:
Provided is a compact two-dimensional electron spectrometer that is capable of variably adjusting the deceleration ratio over a wide range, and performing simultaneous measurement of the two-dimensional emission angle distribution with a high energy resolution over a wide solid angle of acquisition. The two-dimensional electron spectrometer is configured from: a variable deceleration ratio spherical aberration correction electrostatic lens; a cylindrical mirror type energy analyzer or a wide angle energy analyzer; and a projection lens. The variable deceleration ratio spherical aberration correction electrostatic lens is configured from: an electrostatic lens that consists of an axially symmetric spherical mesh having a concave shape with respect to a point source, and one or a plurality of axially symmetrical electrodes, and that adjusts the spherical aberration of charged particles generated from the point source; and an axially symmetric deceleration field generating electrode that is placed coaxially with the electrostatic lens.
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