- 专利标题: CLEANING APPARATUS, SURFACE TREATMENT APPARATUS, AND CLEANING METHOD
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申请号: EP19844015.8申请日: 2019-04-15
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公开(公告)号: EP3808462A1公开(公告)日: 2021-04-21
- 发明人: SATO, Takumi , MIKAWA, Hiroaki , NAGAYASU, Hiromitsu , KAWASAKI, Kohei , MIYAZAKI, Taisuke , OKUZAKI, Yuuichi
- 申请人: MITSUBISHI HEAVY INDUSTRIES, LTD.
- 申请人地址: JP Chiyoda-ku, Tokyo 100-8332 2-3, Marunouchi 3-Chome,
- 代理机构: Hoffmann Eitle
- 优先权: JP2018147032 20180803
- 国际公布: WO2020026534 20200206
- 主分类号: B08B3/02
- IPC分类号: B08B3/02 ; B08B9/093 ; B08B17/02
摘要:
A cleaning apparatus 200 is provided with: a treatment tank 10, which defines a treatment space 15 by the inner surfaces (11a, 11b) thereof and on the inner surfaces of which a water-repellent coating has been applied; a cleaning liquid supply device with nozzles 24a (cleaning liquid spray nozzles) for spraying, into the treatment space 15, a mist of a cleaning liquid CL for cleaning surface treatment processing liquid PL adhering to the surface of a metal part S and/or processing liquid PL adhering to the inner surface; and a drying device, which comprises an air compressor 23a and is for supplying drying air compressed by the air compressor 23a to the treatment space 15.
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