- 专利标题: LASER DEVICE AND DEHUMIDIFICATION MANAGEMENT METHOD FOR LASER DEVICE
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申请号: EP19826579.5申请日: 2019-06-21
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公开(公告)号: EP3817162A1公开(公告)日: 2021-05-05
- 发明人: RYUDO Makoto , NISHIO Masatoshi , WANG Jingbo
- 申请人: Panasonic Intellectual Property Management Co., Ltd.
- 申请人地址: JP Osaka-shi, Osaka 540-6207 1-61, Shiromi 2-chome Chuo-ku
- 代理机构: Vigand, Philippe
- 优先权: JP2018124853 20180629
- 国际公布: WO2020004288 20200102
- 主分类号: H01S5/068
- IPC分类号: H01S5/068 ; H01S3/00 ; H01S3/02 ; H01S5/022
摘要:
A laser device 100 includes a laser oscillator 10, a dehumidifier 11, and a controller 9 controlling an operation of the dehumidifier 11. The controller 9 controls the dehumidifier 11 such that the dew point W inside the laser oscillator 10 is lower than the first dew point W1H when a monolayer or less of water molecules is adsorbed, or such that the dew point W is equal to or higher than the second dew point W2L when more than a monolayer of water molecules is adsorbed inside the laser oscillator 10, and is lower than the third dew point W2H at which the dew condensation starts to occur inside the laser oscillator 10.
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