发明公开
- 专利标题: METHOD OF GRINDING WORKPIECE
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申请号: EP20214584.3申请日: 2020-12-16
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公开(公告)号: EP3838483A1公开(公告)日: 2021-06-23
- 发明人: Sudo, Yujiro
- 申请人: Disco Corporation
- 申请人地址: JP Tokyo 143-8580 13-11, Omori-Kita 2-chome, Ota-ku
- 代理机构: Hoffmann Eitle
- 优先权: JP2019230813 20191220
- 主分类号: B24B27/00
- IPC分类号: B24B27/00 ; H01L21/67 ; B24B7/22 ; B24B41/00 ; B24B41/047 ; H01L21/304 ; B23K26/00
摘要:
A method of grinding a workpiece includes a holding step of holding the workpiece on a flat holding surface of a holding table and a grinding step of rotating a grinding wheel to turn grindstones along an annular track while rotating the holding table, and bringing the grindstones into grinding contact with an upper surface of the workpiece to thereby grind the workpiece. The grinding step includes the step of bringing the grindstones into grinding contact with the upper surface of the workpiece in a state where the annular track is closest to the holding surface in an area between a point above a center of the holding surface and a point above an outer circumferential end of the holding surface.
公开/授权文献
- EP3838483B1 METHOD OF GRINDING WORKPIECE 公开/授权日:2023-02-22
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