Invention Grant
- Patent Title: MICRO-ELECTRO-MECHANICAL DEVICE WITH A SHOCK-PROTECTED TILTABLE STRUCTURE
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Application No.: EP20215797.0Application Date: 2020-12-18
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Publication No.: EP3839605B1Publication Date: 2024-01-24
- Inventor: BONI, Nicolò , CARMINATI, Roberto , MERLI, Massimiliano
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: Via C. Olivetti, 2 20864 Agrate Brianza (MB) IT
- Agency: Studio Torta S.p.A.
- Priority: IT201900025084 20191220
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08
Public/Granted literature
- EP3839605A1 MICRO-ELECTRO-MECHANICAL DEVICE WITH A SHOCK-PROTECTED TILTABLE STRUCTURE Public/Granted day:2021-06-23
Information query
