- 专利标题: A SUPERCONTINUUM RADIATION SOURCE AND ASSOCIATED METROLOGY DEVICES
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申请号: EP20175307.6申请日: 2020-05-19
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公开(公告)号: EP3913429A1公开(公告)日: 2021-11-24
- 发明人: BAUERSCHMIDT, Sebastian Thomas , GÖTZ, Peter Maximilian , UEBEL, Patrick Sebastian
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL 5500 AH Veldhoven P.O. Box 324
- 代理机构: ASML Netherlands B.V.
- 主分类号: G02F1/35
- IPC分类号: G02F1/35 ; G03F7/20 ; G03F9/00
摘要:
Disclosed is a supercontinuum radiation source comprising a modulator being operable to modulate pump laser radiation comprising a train of radiation pulses to provide modulated pump laser radiation, said modulation being such to selectively provide a burst of said pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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