Provided are a stage device, a charged particle beam device, and a vacuum device with which it is possible to increase the speed and acceleration of positioning and to suppress leakage of a magnetic field. To achieve this purpose, this magnetic levitation stage device is equipped with a levitating part, a non-levitating part, a horizontal thrust motor that imparts horizontal thrust to the levitating part when a coil current flows in a horizontal thrust coil, and a vertical thrust motor that imparts vertical thrust to the levitating part when the coil current flows in a vertical thrust coil, wherein: on the lower section of the levitating part, a vertical thrust assist yoke 6ZA is provided at a position facing the end section of the horizontal thrust coil protruding from a horizontal thrust yoke; and when the coil current flows in the horizontal thrust coil, simultaneously with the generation of horizontal thrust by the horizontal thrust yoke, vertical-direction assist thrust FZA is also generated by the vertical thrust assist yoke.