- 专利标题: INSTALLATION FOR DEPOSITING NANOSTRUCTURES ON A SUBSTRATE
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申请号: EP20383152.4申请日: 2020-12-23
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公开(公告)号: EP4019663A1公开(公告)日: 2022-06-29
- 发明人: Bertran Serra, Enric , Bertran González, Enric Manuel , Domingo Risco, Sergi
- 申请人: Advanced Nanotechonologies, S.L. , Universitat de Barcelona
- 申请人地址: ES 08028 Barcelona Doctor Nubiola y Espinós Nº 6-8 Principal 8; ES 08028 Barcelona Centro de Patentes de la UB. C. Baldiri Reixac, 4 Parc Cientific de Barcelona, Torre D
- 代理机构: Balder IP Law, S.L.
- 主分类号: C23C14/14
- IPC分类号: C23C14/14 ; C23C14/26 ; C23C14/28 ; C23C14/30 ; C23C14/32
摘要:
The present invention relates to an installation for depositing nanostructures on a receptor substrate SR, comprising a chamber C, vacuum generating means in the chamber C, one or more receptor substrates SR arranged in the chamber C, and a precursor target T arranged in the chamber C provided with a substrate S and at least one layer 1 of material to be deposited on the receptor substrates SR arranged on the substrate S of the target T, so that an interface IS1 is defined between the substrate S of the target T and the layer 1 of material to be deposited, comprising heating means for heating the substrate S of the target T, the heating means being configured to heat at least the interface IS1 between the substrate S and the layer 1 to the boiling temperature Teb1 of the material of the substrate, so that the vapour of the material of the substrate S generated on the interface IS1 causes the entrainment of nanostructures of the layer 1 intended to be deposited on the receptor substrate(s).
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