- 专利标题： COATING METHOD, COATING BAR HEAD, AND COATING DEVICE
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申请号： EP19941774.2申请日： 2019-09-10
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公开(公告)号： EP4029614A1公开(公告)日： 2022-07-20
- 发明人: NAITO, Katsuyuki , SHIDA, Naomi , SAITO, Mitsunaga , SAITA, Yutaka
- 申请人： Kabushiki Kaisha Toshiba , Toshiba Energy Systems & Solutions Corporation
- 申请人地址： JP Minato-ku Tokyo 105-0023 1-1, Shibaura 1-chome; JP Kawasaki-shi, Kanagawa 212-0013 72-34, Horikawa-cho Saiwai-ku
- 代理机构： Hoffmann Eitle
- 国际公布： WO2021048924 20210318
- 主分类号： B05D1/26
- IPC分类号： B05D1/26 ; B05C1/02
摘要：
[Problem] An embodiment of the present invention provides a coating method, a coating bar head and a coating apparatus which enables coating in which changes in coating film thickness is less likely to occur, even when performing meniscus coating at a high speed.
[Solution] This coating method is a coating method including: supplying a coating liquid between a coating bar head and a substrate to form a meniscus; and moving the substrate, wherein a cross section of the coating surface of the bar head in the direction of coating, is a convex curve, and has bending points at both ends of the curve.
[Solution] This coating method is a coating method including: supplying a coating liquid between a coating bar head and a substrate to form a meniscus; and moving the substrate, wherein a cross section of the coating surface of the bar head in the direction of coating, is a convex curve, and has bending points at both ends of the curve.
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